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| Keywords: New NIST Reference Materials for MEMS devices (8700921663).jpg New NIST Reference Materials for MEMS devices are micromachined and further processed to contain miniature cantilevers beams stair-like step heights microscale rulers and test structures for measuring surface-layer thickness On the left is RM 8096 which was manufactured with an integrated circuit process; on the left is RM 8097 made with a MEMS process See also http //www nist gov/pml/div683/mems_043013 cfm www nist gov/pml/div683/mems_043013 cfm Credit NIST Disclaimer Any mention of commercial products within NIST web pages is for information only; it does not imply recommendation or endorsement by NIST Use of NIST Information These World Wide Web pages are provided as a public service by the National Institute of Standards and Technology NIST With the exception of material marked as copyrighted information presented on these pages is considered public information and may be distributed or copied Use of appropriate byline/photo/image credits is requested https //www flickr com/photos/usnistgov/8700921663/ New NIST Reference Materials for MEMS devices 2012-07-06 14 34 https //www flickr com/people/63059536 N06 National Institute of Standards and Technology PD-USGov National Institute of Standards and Technology https //flickr com/photos/63059536 N06/8700921663 2016-09-07 01 51 37 United States Government Work Uncategorized 2016 September 10 | ||||
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